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Nanofabrication handbook

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Nanofabrication handbook/ edited by Stefano Cabrini, Satoshi Kawata.
other author:	Cabrini, Stefano.
Published:	Boca Raton, FL :CRC Press, : c2012.,
Description:	1 online resource (xv, 518 p.) :ill. :
Subject:	Nanostructured materials - Handbooks, manuals, etc. -
Online resource:	http://www.crcnetbase.com/isbn/9781420090536
Online resource:	https://www.taylorfrancis.com/books/9780429193293
ISBN:	9781420090536

Nanofabrication handbook
Nanofabrication handbook[electronic resource] /edited by Stefano Cabrini, Satoshi Kawata. - Boca Raton, FL :CRC Press,c2012. - 1 online resource (xv, 518 p.) :ill.

Includes bibliographical references and index.

pt. 1. Standard lithography -- pt. 2. New lithographic techniques -- pt. 3. Nanofabrication applications.

ISBN: 9781420090536Subjects--Topical Terms:

561466
Nanostructured materials
--Handbooks, manuals, etc.Index Terms--Genre/Form:

554714
Electronic books.

LC Class. No.: TA418.9.N35 / N2523 2012eb

Dewey Class. No.: 620.1/15

Nanofabrication handbook
LDR:01296cam a2200313Ka 4500 001 1157237
003 OCoLC
005 20151105035018.0
006 m o d
007 cr cnu---unuuu
008 250704s2012 flua obf 001 0 eng d
020 $a 9781420090536 $q (electronic bk.)
020 $a 1420090534 $q (electronic bk.)
020 $z 9781420090529
020 $z 1420090526
020 $a 1280121521
020 $a 9781280121524
035 $a (OCoLC)781629152 $z (OCoLC)785337382 $z (OCoLC)787846554 $z (OCoLC)817067651 $z (OCoLC)824114149 $z (OCoLC)880559326
035 $a ocn781629152
040 $a N $b eng $c N $d EBLCP $d YDXCP $d WAU $d UAB $d OCLCQ $d OCLCF $d BWS $d OCLCO $d OCLCQ $d CRCPR $d OCLCQ $d DEBSZ $d IDEBK $d E7B $d CDX $d OCL
050 4 $a TA418.9.N35 $b N2523 2012eb
082 0 4 $a 620.1/15 $2 23
245 0 0 $a Nanofabrication handbook $h [electronic resource] / $c edited by Stefano Cabrini, Satoshi Kawata.
260 $a Boca Raton, FL : $b CRC Press, $c c2012.
300 $a 1 online resource (xv, 518 p.) : $b ill.
504 $a Includes bibliographical references and index.
505 0 $a pt. 1. Standard lithography -- pt. 2. New lithographic techniques -- pt. 3. Nanofabrication applications.
588 0 $a Print version record.
650 0 $a Nanostructured materials $v Handbooks, manuals, etc. $3 561466 $3 731086
650 0 $a Nanostructures $v Congresses. $3 672781 $3 741282
655 0 $a Electronic books. $2 local $3 554714
700 1 $a Cabrini, Stefano. $3 886917
700 1 $a Kawata, Satoshi, $d 1966- $3 812535
856 4 0 $u http://www.crcnetbase.com/isbn/9781420090536
856 4 0 $u https://www.taylorfrancis.com/books/9780429193293

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