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陳順祺

Overview

Works:	1 works in 1 publications in 1 languages

Titles

氣體阻障層製備於具有連續沉積-蝕刻有機矽基覆蓋之圖案化表面之研究 = = A Study on the Preparation of a Gas Barrier Coated on Patterned Surface Coveraged by Organosilicon Film Using Consecutive Deposition-Etching Process / by: 陳順祺 (Language materials, printed)

Subjects

water vapor permeability. 有機矽基薄膜. under-cut patterned. plasma enhanced chemical vapor deposition. 無機氮氧化矽. 階梯覆蓋性. 底切圖案化. inorganic silicon oxynitride. 水氣滲透率. step coverage. over-cut patterned. 電漿增強化學氣相沉積. 電漿蝕刻. organosilicon. 頂切圖案化. plasma etching.

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