Shen, Ming-Yi.
Overview
| Works: | 1 works in 0 publications in 0 languages | |
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Titles
Effect of Ion Flux (Dose Rate) in Source-Drain Extension Ion Implantation for 10-nm Node FinFET and Beyond on 300/450mm Platforms.
by:
ProQuest Information and Learning Co.; Shen, Ming-Yi.; State University of New York at Albany.
(Language materials, manuscript)