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彭威幀
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0 works in 1 publications in 1 languages
Titles
半導體製程離子佈植機水道設備散熱之有限元素法與最佳化水道設計 = = Finite Element Analysis and Optimal Design of Cooling System for Ion Implantation Equipment in Semiconductor Manufacturing Process /
by: 彭威幀
(Language materials, printed)
Subjects
finite element method.
integrated radiator.
ion implantation.
optimal design.
Thermal Flow Analysis.
一體式散熱器.
最佳化設計.
有限元素法.
熱流分析.
離子佈植.
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