Languages
許藻錶
Overview
Works: | 6 works in 1 publications in 1 languages |
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Titles
非晶質Ta-Ni薄膜製備與積體電路銅金屬化製程整合特性探討 = Evaluation of Ta-Ni amorphous thin film properties for copper metallization in integrated circuits
by:
許藻錶; Jau-Shiung Fang; 方昭訓
(Language materials, printed)