Languages
鄧聖耀
Overview
Works: | 0 works in 1 publications in 1 languages |
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Titles
次微米級光學直度尺應用於精密掃描平台即時直度誤差補償之研究 = The Study On Real-Time Straightness Error Compensation For A Linear Stage Using A Submicron Optical Straightness Measuring System
by:
鄧聖耀; 劉建宏; Chien-Hung Liu
(Language materials, printed)