Wasa, Kiyotaka.

Handbook of sputter deposition technology = fundamentals and applications for functional thin films, nano-materials and MEMS / by: Wasa, Kiyotaka.; Kotera, Hidetoshi.; Kanno, Isaku. (Language materials, printed)

Thin film materials technology = sputtering of compound materials / by: Adachi, Hideaki.; Wasa, Kiyotaka.; Kitabatake, Makoto. (Language materials, printed)