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Optical inspection of microsystems /
~
Osten, Wolfgang.
Optical inspection of microsystems /
Record Type:
Language materials, printed : Monograph/item
Title/Author:
Optical inspection of microsystems // edited by Wolfgang Osten.
other author:
Osten, Wolfgang.
Published:
Boca Raton, FL :CRC/Taylor & Francis, : c2007.,
Description:
503 p., [8] p. of plates :ill. (some col.) ; : 27 cm.;
Subject:
Quality control - Optical methods. -
Online resource:
http://www.crcnetbase.com/doi/book/10.1201/9781420019162
ISBN:
9780849336829
Optical inspection of microsystems /
Optical inspection of microsystems /
edited by Wolfgang Osten. - Boca Raton, FL :CRC/Taylor & Francis,c2007. - 503 p., [8] p. of plates :ill. (some col.) ;27 cm. - Optical science and engineering ;109. - Optical science and engineering (Boca Raton, Fla.) ;138..
Includes bibliographical references and index.
ISBN: 9780849336829
LCCN: 2005046670
Nat. Bib. No.: GBA612882bnb
Nat. Bib. Agency Control No.: 013375896UkSubjects--Topical Terms:
761184
Quality control
--Optical methods.
LC Class. No.: TS156.2 / .O652 2007
Dewey Class. No.: 670.42/5
Optical inspection of microsystems /
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Optical inspection of microsystems /
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edited by Wolfgang Osten.
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Boca Raton, FL :
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CRC/Taylor & Francis,
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c2007.
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503 p., [8] p. of plates :
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ill. (some col.) ;
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27 cm.
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Optical science and engineering ;
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109
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Includes bibliographical references and index.
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Also available as an electronic resource.
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CRC Press (http://www.crcpress.com)
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Quality control
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Optical methods.
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Optical detectors
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Osten, Wolfgang.
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Optical science and engineering (Boca Raton, Fla.) ;
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http://www.crcnetbase.com/doi/book/10.1201/9781420019162
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BRFL - 001 and 003 fields altered to contain TFG custom control number - 2010/03/12
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