國立虎尾科技大學 |

Design and Fabrication of MEMS Microheater and Its Application in Gas Sensing.

Record Type:	Language materials, manuscript : Monograph/item
Title/Author:	Design and Fabrication of MEMS Microheater and Its Application in Gas Sensing./
Author:	Chen, Yulong.
Description:	1 online resource (225 pages)
Notes:	Source: Dissertations Abstracts International, Volume: 84-12, Section: B.
Contained By:	Dissertations Abstracts International84-12B.
Subject:	Applied physics. -
Online resource:	click for full text (PQDT)
ISBN:	9798379732660

Design and Fabrication of MEMS Microheater and Its Application in Gas Sensing.
Chen, Yulong.

Design and Fabrication of MEMS Microheater and Its Application in Gas Sensing. - 1 online resource (225 pages)

Source: Dissertations Abstracts International, Volume: 84-12, Section: B.

Thesis (Ph.D.)--University of Macau, 2022.

Includes bibliographical references

Gas sensors are widely applied in industrial production, environmental monitoring, food security, aerospace and biomedical treatment. With the development of the Internet of things, the demand for gas sensors in the consumer market is growing. In this work, a low-cost and high-performance microheater was designed and manufactured using the micro-electro-mechanical system (MEMS) process, and its application in gas sensors was studied. The design method and manufacturing process of the microheater were systematically studied, and a very simplified microheater manufacturing process was proposed for the first time and applied in practice. Then metal oxide semiconductor (MOS) gas sensors based on this microheater were manufactured. A high structure efficiency microheater-based catalytic combustion gas sensor was put forward and validated.Through optimization of design structure and key processes, a microheater that only needed a two-step lithography process was successfully validated. Small-batch production was realized at the Micro & Nano Fabrication Center in SUSTech's Core Research Facilities. This microheater had a power consumption of less than 40 mW at 400 ºC and displayed a homogeneous temperature in the heating zone. Based on an optimized packaging process, a packaged microheater was manufactured, and the reliability of the packaging was validated. The achievements in this work will underlie the application of this microheater in the field of gas sensors.Commercially available tin oxide powders are used to prepare MEMS MOS gas sensor based on microheater developed in this work. The sensing performance towards gaseous ethanol was tested. The optimal working temperature was determined to be ~ 400 °C with a small power consumption of 39 mW. The maximum sensitivity to 10 ppm ethanol is 29.7, which exceeds that of commercial MEMS MOS sensors in the market.Based on the above microheater design method and optimized process, a microheater for catalytic combustion gas sensors was designed and manufactured. With commercially available palladium doped alumina heterogeneous catalysts, catalytic combustion gas sensors were made and used to test for methane gas sensing. High-performance catalytic combustion gas sensors based on surface tension driven self-aligned double-side coating were manufactured for the first time. The sensitivity to methane gas is increased by 69.0 % compared to that of conventional single-side coated sensor.The development and optimizations in this study pave a significant way towards advanced gas sensor applications based on MEMS microheater.

Electronic reproduction.
Ann Arbor, Mich. :
ProQuest,
2024

Mode of access: World Wide Web

ISBN: 9798379732660Subjects--Topical Terms:

1181953
Applied physics.
Subjects--Index Terms:

FabricationIndex Terms--Genre/Form:

554714
Electronic books.

Design and Fabrication of MEMS Microheater and Its Application in Gas Sensing.
LDR:03969ntm a22003857 4500 001 1147976
005 20240916065953.5
006 m o d
007 cr bn ---uuuuu
008 250605s2022 xx obm 000 0 eng d
020 $a 9798379732660
035 $a (MiAaPQ)AAI30529969
035 $a AAI30529969
040 $a MiAaPQ $b eng $c MiAaPQ $d NTU
100 1 $a Chen, Yulong. $3 1473831
245 1 0 $a Design and Fabrication of MEMS Microheater and Its Application in Gas Sensing.
264 0 $c 2022
300 $a 1 online resource (225 pages)
336 $a text $b txt $2 rdacontent
337 $a computer $b c $2 rdamedia
338 $a online resource $b cr $2 rdacarrier
500 $a Source: Dissertations Abstracts International, Volume: 84-12, Section: B.
500 $a Advisor: Ng, Kar Wei;Cheng, Xing.
502 $a Thesis (Ph.D.)--University of Macau, 2022.
504 $a Includes bibliographical references
520 $a Gas sensors are widely applied in industrial production, environmental monitoring, food security, aerospace and biomedical treatment. With the development of the Internet of things, the demand for gas sensors in the consumer market is growing. In this work, a low-cost and high-performance microheater was designed and manufactured using the micro-electro-mechanical system (MEMS) process, and its application in gas sensors was studied. The design method and manufacturing process of the microheater were systematically studied, and a very simplified microheater manufacturing process was proposed for the first time and applied in practice. Then metal oxide semiconductor (MOS) gas sensors based on this microheater were manufactured. A high structure efficiency microheater-based catalytic combustion gas sensor was put forward and validated.Through optimization of design structure and key processes, a microheater that only needed a two-step lithography process was successfully validated. Small-batch production was realized at the Micro & Nano Fabrication Center in SUSTech's Core Research Facilities. This microheater had a power consumption of less than 40 mW at 400 ºC and displayed a homogeneous temperature in the heating zone. Based on an optimized packaging process, a packaged microheater was manufactured, and the reliability of the packaging was validated. The achievements in this work will underlie the application of this microheater in the field of gas sensors.Commercially available tin oxide powders are used to prepare MEMS MOS gas sensor based on microheater developed in this work. The sensing performance towards gaseous ethanol was tested. The optimal working temperature was determined to be ~ 400 °C with a small power consumption of 39 mW. The maximum sensitivity to 10 ppm ethanol is 29.7, which exceeds that of commercial MEMS MOS sensors in the market.Based on the above microheater design method and optimized process, a microheater for catalytic combustion gas sensors was designed and manufactured. With commercially available palladium doped alumina heterogeneous catalysts, catalytic combustion gas sensors were made and used to test for methane gas sensing. High-performance catalytic combustion gas sensors based on surface tension driven self-aligned double-side coating were manufactured for the first time. The sensitivity to methane gas is increased by 69.0 % compared to that of conventional single-side coated sensor.The development and optimizations in this study pave a significant way towards advanced gas sensor applications based on MEMS microheater.
533 $a Electronic reproduction. $b Ann Arbor, Mich. : $c ProQuest, $d 2024
538 $a Mode of access: World Wide Web
650 4 $a Applied physics. $3 1181953
650 4 $a Materials science. $3 557839
653 $a Fabrication
653 $a Gas sensing
653 $a Environmental monitoring
653 $a Metal oxide semiconductor
653 $a Heating zone
655 7 $a Electronic books. $2 local $3 554714
690 $a 0215
690 $a 0794
710 2 $a ProQuest Information and Learning Co. $3 1178819
710 2 $a University of Macau. $b Applied Physics and Materials Engineering. $3 1469213
773 0 $t Dissertations Abstracts International $g 84-12B.
856 4 0 $u http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=30529969 $z click for full text (PQDT)