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Principles of lithography /

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Levinson, Harry J.

Principles of lithography /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Principles of lithography // Harry J. Levinson.
Author:	Levinson, Harry J.
Published:	Bellingham, Wash. :SPIE Press, : c2010.,
Description:	xiv, 504 p., [4] p. of plates :ill. (some col.) ; : 27 cm.;
Subject:	Integrated circuits - Design and construction. -
ISBN:	9780819483249 :

Principles of lithography /
Levinson, Harry J.

Principles of lithography /Harry J. Levinson. - 3rd ed. - Bellingham, Wash. :SPIE Press,c2010. - xiv, 504 p., [4] p. of plates :ill. (some col.) ;27 cm. - SPIE ;v. PM198.

Includes bibliographical references and index.

ISBN: 9780819483249 :NT3331

LCCN: 2010026775Subjects--Topical Terms:

561265
Integrated circuits
--Design and construction.

LC Class. No.: TK7874 / .L397 2010

Dewey Class. No.: 621.3815/31

Principles of lithography /
LDR:00652cam a2200217 a 4500 001 826132
005 20151202091708.0
008 151211s2010 wauaf b 001 0 eng
010 $a 2010026775
020 $a 9780819483249 : $c NT3331
035 $a 00042027
040 $a DLC $c DLC $d DLC $d NFU
041 0 $a eng
042 $a pcc
050 0 0 $a TK7874 $b .L397 2010
082 0 0 $a 621.3815/31 $2 22
100 1 $a Levinson, Harry J. $3 877218
245 1 0 $a Principles of lithography / $c Harry J. Levinson.
250 $a 3rd ed.
260 $a Bellingham, Wash. : $b SPIE Press, $c c2010.
300 $a xiv, 504 p., [4] p. of plates : $b ill. (some col.) ; $c 27 cm.
490 0 $a SPIE ; $v v. PM198
504 $a Includes bibliographical references and index.
650 0 $a Integrated circuits $x Design and construction. $3 561265
650 0 $a Microlithography. $3 562355

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E042027

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621.381531 L665 2010

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1 records • Pages 1 •
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