AlTiN.

多元多層氮化鋁鈦/氮化鉻鉬硬質薄膜之機械性質與磨潤性能 = = Mechanical Properties and Tribological Performance of Multilayered AlTiN/CrMoN Hard Coatings Synthesized by Cathodic Arc Evaporation / by: (Language materials, printed)

陰極電弧系統之新型電磁控弧源設計與沉積氮化鋁鈦硬質薄膜機械性質研究 = = Electric Magnetron Arc Source Design of Cathodic Arc Evaporation and Deposition of AlTiN Hard Coatings / by: (Language materials, printed)

電磁控弧源.

硬質薄膜.

mechanical properties.

multilayer.

hard coating.

CrMoN.

mechanical.

陰極電弧沉積.

多層薄膜.

氮化鋁鈦.

氮化鉻鉬.

split arc.

tribological.

AlTiN.

magnetron source.

硬質鍍膜.

機械性質.

磨潤性質.