Sunlight.

具厚膜修飾圖案化水氣阻障層撓曲及照光可靠性之研究 = = Study on the flexure and illumination reliability of the thick film modified patterned water vapor barrier / by: (Language materials, printed)

高頻電漿增強化學氣相沉積法.

under-cut patterned.

射頻電漿增強化學氣相沉積法.

plasma enhanced chemical vapor deposition.

太陽光.

inorganic silicon oxynitride.

底切圖案化.

階梯覆蓋性.

step coverage.

水氣滲透率.

UV.

organosilicon.

Sunlight.

bending reliability.

紫外光.

氮氧化矽薄膜.

water vapor permeability.

撓曲測試.

VHF-PECVD.

有機矽基薄膜.