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Sunlight.
Overview
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1 works in 1 publications in 1 languages
Titles
具厚膜修飾圖案化水氣阻障層撓曲及照光可靠性之研究 = = Study on the flexure and illumination reliability of the thick film modified patterned water vapor barrier /
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Subjects
高頻電漿增強化學氣相沉積法.
under-cut patterned.
射頻電漿增強化學氣相沉積法.
plasma enhanced chemical vapor deposition.
太陽光.
inorganic silicon oxynitride.
底切圖案化.
階梯覆蓋性.
step coverage.
水氣滲透率.
UV.
organosilicon.
Sunlight.
bending reliability.
紫外光.
氮氧化矽薄膜.
water vapor permeability.
撓曲測試.
VHF-PECVD.
有機矽基薄膜.
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