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Yttrium oxyfluoride.
Overview
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1 works in 1 publications in 1 languages
Titles
六氟化硫電漿表面處理氧化釔薄膜之特性及耐蝕刻行為研究 = = Characterization and Etching Resistance of Yttrium Oxide Film after Sulfur Fluoried Plasma Surface Treatment /
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Plasma surface treatment.
氟氧化釔.
RF magnetron sputtering.
射頻磁控濺鍍.
電漿表面處理.
Yttrium oxyfluoride.
Yttrium oxide.
氧化釔.
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