鎳鈷鈦奈米多層膜.

膜厚對鎳鈷鈦奈米多層膜電性之研究 = = Study on the Influence of Film Thickness on the Electrical Properties of nickel-cobalt-titanium Nano Multilayer Films / by: (Language materials, printed)

低溫快速退火.

silicon carbide.

矽基板.

碳化矽.

鎳鈷鈦奈米多層膜.

glass substrate.

玻璃基板.

electron beam evaporation.

電子束蒸鍍.

low temperature rapid annealing.

NiCoTi nano multilayer film.

silicon substrate.