Feeder.

熱蒸鍍多料源送料器之設計 = = Design of the multi-source feeder in thermal evaporation / by: (書目-語言資料,印刷品)

雙壓電驅動直進送料機之同步控制 = = Synchronous Control of an Inline Part Feeder Driven by Two Piezoelectric Actuators / by: (書目-語言資料,印刷品)

送料機.

熱蒸鍍.

Scott-Russell機構.

Piezoelectric driven.

同步控制.

壓電驅動.

送料器.

Feeder.

Synchronous control.

Scott-Russell mechanism.

Thermal evaporation.