Thermal Flow Analysis.

半導體製程離子佈植機水道設備散熱之有限元素法與最佳化水道設計 = = Finite Element Analysis and Optimal Design of Cooling System for Ion Implantation Equipment in Semiconductor Manufacturing Process / by: (Language materials, printed)

optimal design.

Thermal Flow Analysis.

最佳化設計.

有限元素法.

離子佈植.

finite element method.

integrated radiator.

ion implantation.

一體式散熱器.

熱流分析.