Microelectromechanical systems - Materials.

Handbook of silicon based MEMS = materials & technologies / by: (Language materials, printed)

MEMS materials and processes handbook by: (Language materials, printed)

Electronics and Microelectronics, Instrumentation.

Microelectromechanical systems

Silicon

Circuits and Systems.

Materials Science, general.

Surfaces and Interfaces, Thin Films.

Microelectromechanical systems.

Engineering.