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李文菁
Overview
Works: | 1 works in 1 publications in 1 languages |
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Titles
5 nm之Ru-(Ta)-B擴散阻障層與銅製程特性 = 5 nm of Ru-(Ta)-B diffusion barrier layer and copper processing characteristics
by:
Wen-Jing Li; 李文菁; 方昭訓; Jau-Shiun Fang
(Language materials, printed)
Subjects