Languages
蘇武加
Overview
| Works: | 2 works in 1 publications in 1 languages | |
|---|---|---|
Titles
Ta-Si-C 非晶質擴散阻障應用於 銅製程之特性研究 = Characteristics of amorphous Ta-Si-C film as a diffusion barrier for copper metallization
by:
Jau-Shiung Fang; 方昭訓; Wu-Jia Su; 蘇武加
(Language materials, printed)