| Record Type: |
Language materials, printed
: Monograph/item
|
| Title/Author: |
半導體製程設備技術 = / 楊子明等編著. |
| Reminder of title: |
Semiconductor technology process and equipment / |
| remainder title: |
Semiconductor technology process and equipment |
| Author: |
楊子明 |
| Published: |
臺北市 : 五南圖書, : 2024.05., |
| Description: |
[12], 418面 : 圖, 表 ; : 26公分; |
| Notes: |
含參考書目及索引 |
| Subject: |
半導體 - |
| ISBN: |
9786263933569 |