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Transmission electron microscopy of ...

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Sheng, T. T

Transmission electron microscopy of silicon VLSI circuits and structures

Record Type:	Language materials, printed : monographic
Author:	MarcusR. B,
Alternative Intellectual Responsibility:	ShengT. T,
Place of Publication:	N.Y
Published:	John Wiley & Sons;
Year of Publication:	1984
Description:	ix, 217 pill : 30cm;
ISBN:	0471092517

Transmission electron microscopy of silicon VLSI circuits and structures
Marcus, R. B

Transmission electron microscopy of silicon VLSI circuits and structures / R. B. Marcus ; T. T. Sheng - N.Y : John Wiley & Sons, 1984. - ix, 217 p ; ill ; 30cm.
ISBN 0471092517

Sheng, T. T

Transmission electron microscopy of silicon VLSI circuits and structures
LDR:00470cam0 2200145 450 001 425457
005 20101024002739.0
010 1 $a 0471092517 $b (hard) $d gift
100 $a 20080130d1984 m y0engy01 b
101 0 $a eng
105 $a a z 001zy
200 1 $a Transmission electron microscopy of silicon VLSI circuits and structures $f R. B. Marcus $g T. T. Sheng
210 $a N.Y $c John Wiley & Sons $d 1984
215 1 $a ix, 217 p $c ill $d 30cm
676 $a 621.395
700 $a Marcus $b R. B $3 404677
701 $a Sheng $b T. T $3 404678
801 0 $a cw $b 國立虎尾科技大學圖書館 $c 19950823 $g CCR

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621.395 M322 1984

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