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Fundamentals of microfabrication
~
Madou, Marc J
Fundamentals of microfabrication
Record Type:
Language materials, printed : monographic
Author:
MadouMarc J,
Place of Publication:
Boca Raton, Fla
Published:
CRC Press;
Year of Publication:
c1997
Description:
589 p., [22] p. of platesill. (some col.) : 29 cm;
Subject:
Microelectronics - Design and construction -
Subject:
Machining -
Subject:
Microelectronic packaging -
Subject:
Lasers - Industrial applications -
ISBN:
0849394511
Fundamentals of microfabrication
Madou, Marc J
Fundamentals of microfabrication
/ Marc Madou - Boca Raton, Fla : CRC Press, c1997. - 589 p., [22] p. of plates ; ill. (some col.) ; 29 cm.
Includes bibliographical references (p. 565-569) and index.
ISBN 0849394511
MicroelectronicsMachiningMicroelectronic packagingLasers -- Design and construction -- Industrial applications
Fundamentals of microfabrication
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589 p., [22] p. of plates
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ill. (some col.)
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29 cm
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Includes bibliographical references (p. 565-569) and index
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Microelectronics
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Machining
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CCR
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