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Microsystem technology and microrobotics

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Rembold, Ulrich

Microsystem technology and microrobotics

Record Type:	Language materials, printed : monographic
Author:	FatikowS,
Secondary Intellectual Responsibility:	RemboldUlrich,
Place of Publication:	Berlin
Published:	Springer;
Year of Publication:	c1997
Description:	xii, 408 pill : 24 cm;
Subject:	Electromechanical devices - Design and construction -
Subject:	Microfabrication -
Subject:	Robotics -
ISBN:	9624300925

Microsystem technology and microrobotics
Fatikow, S

Microsystem technology and microrobotics / S. Fatikow, U. Rembold - Berlin : Springer, c1997. - xii, 408 p ; ill ; 24 cm.
Includes bibliographical references (p. [366]-401) and index.
ISBN 9624300925
Electromechanical devicesMicrofabricationRobotics -- Design and construction

Rembold, Ulrich

Microsystem technology and microrobotics
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101 0 $a eng
200 1 $a Microsystem technology and microrobotics $f S. Fatikow, U. Rembold
210 $a Berlin $c Springer $d c1997
215 1 $a xii, 408 p $c ill $d 24 cm
320 $a Includes bibliographical references (p. [366]-401) and index
606 $a Electromechanical devices $x Design and construction $3 427927 $2 lc $3 736036
606 $a Microfabrication $3 427928 $2 lc $3 727092
606 $a Robotics $3 397953 $2 lc $3 726370
676 $a 621 $v 2100
680 $a TJ163 $b F38 199700
700 $a Fatikow $b S $3 427925
702 $a Rembold $b Ulrich $3 427926
801 0 $b NHIT
801 0 $a cw $b 國立國立虎尾科技大學圖書館 $c 20000925 $g CCR

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621 F253 1997

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