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Optical diagnostics for thin film pr...

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Herman, Irving P

Optical diagnostics for thin film processing

Record Type:	Language materials, printed : monographic
Author:	HermanIrving P,
Place of Publication:	CA
Published:	Academic Press;
Year of Publication:	c1996
Description:	xxix,783pill : 23cm;
Subject:	Thin films - Surfaces -
Subject:	Spectrum analysis - Industrial applications -
Notes:	Includes index
ISBN:	0123420709

Optical diagnostics for thin film processing
Herman, Irving P

Optical diagnostics for thin film processing / Irving P. Herman - CA : Academic Press, c1996. - xxix,783p ; ill ; 23cm.
Includes index.
ISBN 0123420709
Thin filmsSpectrum analysis -- Surfaces -- Industrial applications

Optical diagnostics for thin film processing
LDR:00494cam0 2200169 450 001 448474
005 20101023182357.0
009 a000554000554
010 1 $a 0123420709 $b (hard)
100 $a 20080130f 1996m y0engy01 b
101 0 $a eng
200 1 $a Optical diagnostics for thin film processing $f Irving P. Herman
210 $a CA $c Academic Press $d c1996
215 1 $a xxix,783p $c ill $d 23cm
300 $a Includes index
606 $a Thin films $x Surfaces $3 407324 $2 lc $3 728548
606 $a Spectrum analysis $x Industrial applications $3 430439 $2 lc $3 728549
676 $a 621.3815
676 $a 621.38152 $b H551
700 $a Herman $b Irving P $3 430438
801 1 $a cw $b 國立虎尾科技大學圖書館圖書館 $c 20010423

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621.38152 H551 1996

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