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Modeling MEMS and NEMS

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Bernstein, David H

Modeling MEMS and NEMS

Record Type:	Language materials, printed : monographic
Author:	PeleskoJohn A,
Secondary Intellectual Responsibility:	BernsteinDavid H,
Place of Publication:	Boca Raton, FL
Published:	Chapman & Hall/CRC;
Year of Publication:	2003
Description:	xxiii, 357 pill. ; 25 cm :
Subject:	Microelectromechanical systems - Mathematical models -
ISBN:	1584883065

Modeling MEMS and NEMS
Pelesko, John A

Modeling MEMS and NEMS / John A. Pelesko, David H. Bernstein - Boca Raton, FL : Chapman & Hall/CRC, 2003. - xxiii, 357 p ; ill. ; 25 cm.
Includes bibliographical references (p. 325-340) and index.
ISBN 1584883065
Microelectromechanical systems -- Mathematical models

Bernstein, David H

Modeling MEMS and NEMS
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200 1 $a Modeling MEMS and NEMS $f John A. Pelesko, David H. Bernstein
210 $a Boca Raton, FL $c Chapman & Hall/CRC $d 2003
215 0 $a xxiii, 357 p $c ill. ; 25 cm
320 $a Includes bibliographical references (p. 325-340) and index
606 $a Microelectromechanical systems $x Mathematical models $3 440293 $2 lc $3 740935
676 $a 621.3 $v 21
680 $a TK7875 $b P45 2003
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702 $a Bernstein $b David H $3 440292
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801 1 $a cw $b 國立虎尾科技大學圖書館圖書館 $c 20031027

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621.3 P381 2003

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