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MEMS and NEMS : systems, devices, an...

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Lyshevski, Sergey Edward

MEMS and NEMS : systems, devices, and structures

Record Type:	Language materials, printed : monographic
Title Information:	systems, devices, and structures
Author:	LyshevskiSergey Edward,
Place of Publication:	Boca Raton, Fla
Published:	CRC Press;
Year of Publication:	c2002
Description:	461 pill : 25 cm;
Series:
Subject:	Microelectromechanical systems -
ISBN:	0849312620

MEMS and NEMS : systems, devices, and structures
Lyshevski, Sergey Edward

MEMS and NEMS : systems, devices, and structures / Sergey Edward Lyshevski - Boca Raton, Fla : CRC Press, c2002. - 461 p ; ill ; 25 cm.
Includes bibliographical references and index.
ISBN 0849312620
Microelectromechanical systems

MEMS and NEMS : systems, devices, and structures
LDR:00620cam 2200205 i 450 001 460547
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009 awj 92000020
010 1 $2 280 $a 0849312620 $d NT
100 $a 20080130f 2002m y0engy01 b
101 0 $a eng
200 1 $a MEMS and NEMS $e systems, devices, and structures $f Sergey Edward Lyshevski
210 $a Boca Raton, Fla $c CRC Press $d c2002
215 0 $a 461 p $c ill $d 25 cm
225 N
320 $a Includes bibliographical references and index
606 $a Microelectromechanical systems $3 428971 $2 lc $3 725547
676 $a 621.381 $v 21
680 $a TK7875 $b L9597 2002
700 $a Lyshevski $b Sergey Edward $3 444197
801 0 $b DLC
801 0 $a cw $b BIB $c 20031027
801 1 $a cw $b 國立虎尾科技大學圖書館圖書館 $c 20031027

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