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Microlithography : science and techn...

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Sheats, Jam

Microlithography : science and technology

紀錄類型:	書目-語言資料,印刷品 : 單行本
副題名:	science and technology
作者:	SheatsJam,
合作者:	SmithBru,
出版地:	New York
出版者:	Marcel Dekker;
出版年:	1
面頁冊數:	xii, 780 pill : 24;
標題:	Microlithography - Industrial applicati -
標題:	Integrated circuits - Ma -
標題:	Metal oxide semiconductors, Complementary - Design and construct -
標題:	Manufacturing processe -
ISBN:	0824799534

Microlithography : science and technology
Sheats, Jam

Microlithography : science and technology / edited by James R. Sheats ; Bruce W. Sm - New York : Marcel Dekker, 1. - xii, 780 p ; ill ; 24.
Includes bibliographical references and in.
ISBN 0824799534
MicrolithographyIntegrated circuitsMetal oxide semiconductors, ComplementaryManufacturing processe -- Industrial applicati -- Ma -- Design and construct

Smith, Bru

Microlithography : science and technology
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606 $a Microlithography $x Industrial applicati $3 446598
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