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Microlithography : science and techn...

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Sheats, Jam

Microlithography : science and technology

Record Type:	Language materials, printed : monographic
Title Information:	science and technology
Author:	SheatsJam,
Alternative Intellectual Responsibility:	SmithBru,
Place of Publication:	New York
Published:	Marcel Dekker;
Year of Publication:	1
Description:	xii, 780 pill : 24;
Subject:	Microlithography - Industrial applicati -
Subject:	Integrated circuits - Ma -
Subject:	Metal oxide semiconductors, Complementary - Design and construct -
Subject:	Manufacturing processe -
ISBN:	0824799534

Microlithography : science and technology
Sheats, Jam

Microlithography : science and technology / edited by James R. Sheats ; Bruce W. Sm - New York : Marcel Dekker, 1. - xii, 780 p ; ill ; 24.
Includes bibliographical references and in.
ISBN 0824799534
MicrolithographyIntegrated circuitsMetal oxide semiconductors, ComplementaryManufacturing processe -- Industrial applicati -- Ma -- Design and construct

Smith, Bru

Microlithography : science and technology
LDR:00547cam0 2200193 450 001 460558
005 20101024093442.0
009 a00018123
010 1 $a 0824799534 $b (hard) $d NT
100 $a 20080130d1998 m y0engy01 b
101 1 $a eng
102 $a us
105 $a z z 00
200 0 y $a Microlithography $e science and technology $f edited by James R. Sheats $g Bruce W. Sm
210 i t $a New York $c Marcel Dekker $d 1
215 9 9 $a xii, 780 p $c ill $d 24
320 c $a Includes bibliographical references and in
606 $a Microlithography $x Industrial applicati $3 446598
606 $a Integrated circuits $x Ma $3 446599
606 $a Metal oxide semiconductors, Complementary $x Design and construct $3 446600
606 $a Manufacturing processe $3 446641
676 s $a 621.381
676 5 / $a 621.381531 $b
700 $a Sheats $b Jam $3 446596
701 $a Smith $b Bru $3 446597
801 c e $a cw $b NHIT $c 20020308

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E022053

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621.381531 S539

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