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Handbook of VLSI microlithography : ...

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Helbert, John N

Handbook of VLSI microlithography : principles, technology, and applications

Record Type:	Language materials, printed : monographic
Title Information:	principles, technology, and applications
Secondary Intellectual Responsibility:	HelbertJohn N,
Place of Publication:	Park Ridge, NJ
Published:	Noyes Publications;
Year of Publication:	c2001
Edition:	2nd ed
Description:	xxi, 1001 pill : 24 cm;
Subject:	Integrated circuits - Very large scale integration -
Subject:	Microlithography -
ISBN:	0815514441

Handbook of VLSI microlithography : principles, technology, and applications
Handbook of VLSI microlithography : principles, technology, and applications / edited by John N. Helbert - 2nd ed. - Park Ridge, NJ : Noyes Publications, c2001. - xxi, 1001 p ; ill ; 24 cm.
Includes bibliographical references and index.
ISBN 0815514441
Integrated circuitsMicrolithography -- Very large scale integration

Helbert, John N

Handbook of VLSI microlithography : principles, technology, and applications
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200 1 $a Handbook of VLSI microlithography $e principles, technology, and applications $f edited by John N. Helbert
205 $a 2nd ed
210 $a Park Ridge, NJ $c Noyes Publications $d c2001
215 0 $a xxi, 1001 p $c ill $d 24 cm
320 $a Includes bibliographical references and index
606 $a Integrated circuits $x Very large scale integration $3 392457 $2 lc $3 725736
606 $a Microlithography $3 447237 $2 lc $3 731940
676 $a 621.3815/31 $v 21
680 $a TK7874 $b H3494 2001
702 $a Helbert $b John N $3 447236
801 0 $b DLC
801 0 $a cw $b BIB $c 20031027
801 1 $a cw $b 國立虎尾科技大學圖書館圖書館 $c 20031027

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621.3815 H236 2001

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