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Introduction to microfabrication

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Franssila, Sami

Introduction to microfabrication

Record Type:	Language materials, printed : monographic
Author:	FranssilaSami,
Place of Publication:	Chichester, West Sussex, England
Published:	J. Wiley;
Year of Publication:	c2004
Description:	xvii, 401 pill : 25 cm;
Subject:	Microfabrication -
Subject:	Electronic apparatus and appliances -
Subject:	Microelectromechanical systems -
ISBN:	0470851058

Introduction to microfabrication
Franssila, Sami

Introduction to microfabrication / Sami Franssila - Chichester, West Sussex, England : J. Wiley, c2004. - xvii, 401 p ; ill ; 25 cm.
Includes bibliographical references and index.
ISBN 0470851058ISBN 0470851066
MicrofabricationElectronic apparatus and appliancesMicroelectromechanical systems

Introduction to microfabrication
LDR:00623cam 2200205 i 450 001 487619
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009 a2004004940
010 1 $a 0470851058 $b (cloth)
010 1 $a 0470851066 $b (pbk.) $d NT
100 $a 20080130f 2004m y0engy01 b
101 0 $a eng
200 1 $a Introduction to microfabrication $f Sami Franssila
210 $a Chichester, West Sussex, England $d c2004 $c J. Wiley
215 0 $a xvii, 401 p $c ill $d 25 cm
320 $a Includes bibliographical references and index
606 $a Microfabrication $3 427928 $2 lc $3 727092
606 $a Electronic apparatus and appliances $3 407518 $2 lc $3 726332
606 $a Microelectromechanical systems $3 428971 $2 lc $3 725547
676 $a 621.3 $v 22
680 $a TK7875 $b F73 2004
700 $a Franssila $b Sami $3 478304
801 0 $b DLC
801 0 $a cw $b BIB $c 20070124
801 1 $a cw $b 虎尾科技大學圖書館 $c 20070124

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E024777

圖書館3F 書庫

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621.3 F835 2004

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