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Nano- and micro-electromechanical sy...

Lyshevski, Sergey Edward

Nano- and micro-electromechanical systems : fundamentals of nano- and microengineering

Record Type:	Language materials, printed : monographic
Title Information:	fundamentals of nano- and microengineering
Author:	LyshevskiSergey Edward,
Place of Publication:	Boca Raton, Fla
Published:	CRC Press;
Year of Publication:	c2005
Edition:	2nd ed
Description:	722 pill : 26 cm;
Series:
Subject:	Microelectromechanical systems -
Subject:	Nanotechnology -
ISBN:	0849328381

Nano- and micro-electromechanical systems : fundamentals of nano- and microengineering
Lyshevski, Sergey Edward

Nano- and micro-electromechanical systems : fundamentals of nano- and microengineering / Sergey Edward Lyshevski - 2nd ed. - Boca Raton, Fla : CRC Press, c2005. - 722 p ; ill ; 26 cm. - ( ; 8).
Includes bibliographical references and index.
ISBN 0849328381
Microelectromechanical systemsNanotechnology

Nano- and micro-electromechanical systems : fundamentals of nano- and microengineering
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200 1 $a Nano- and micro-electromechanical systems $e fundamentals of nano- and microengineering $f Sergey Edward Lyshevski
205 $a 2nd ed
210 $a Boca Raton, Fla $c CRC Press $d c2005
215 0 $a 722 p $c ill $d 26 cm
225 N $v 8
320 $a Includes bibliographical references and index
606 $a Microelectromechanical systems $3 428971 $2 lc $3 725547
606 $a Nanotechnology $3 420162 $2 lc $3 724362
676 $a 621.381 $v 22
680 $a TK7875 $b L96 2005
700 $a Lyshevski $b Sergey Edward $3 444197
801 0 $b DLC
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801 1 $a cw $b 虎尾科技大學圖書館 $c 20061121