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Micro process engineering : fundamen...

Kockmann, Norbert

Micro process engineering : fundamentals, devices, fabrication, and applications

Record Type:	Language materials, printed : monographic
Title Information:	fundamentals, devices, fabrication, and applications
Secondary Intellectual Responsibility:	KockmannNorbert,
Place of Publication:	Weinheim
Published:	Wiley-VCH;
Year of Publication:	c2006
Description:	xxii, 507 pill : 25 cm;
Series:
Subject:	Microtechnology -
Subject:	Production engineering -
ISBN:	9783527312463

Micro process engineering : fundamentals, devices, fabrication, and applications
Micro process engineering : fundamentals, devices, fabrication, and applications / volume editor, Norbert Kockmann - Weinheim : Wiley-VCH, c2006. - xxii, 507 p ; ill ; 25 cm. - ( ; 5).
Includes bibliographical references and index.
ISBN 9783527312463ISBN 9783527312467ISBN 3527312463
MicrotechnologyProduction engineering

Kockmann, Norbert

Micro process engineering : fundamentals, devices, fabrication, and applications
LDR:00741nam 2200241 i 450 001 498794
005 20101024071806.0
009 a(OCoLC)ocm64728209
009 a2006296404
010 1 $a 9783527312463
010 1 $a 9783527312467
010 1 $a 3527312463 $b (hbk.) $d NT
100 $a 20080130
101 0 $a eng
200 1 $a Micro process engineering $e fundamentals, devices, fabrication, and applications $f volume editor, Norbert Kockmann
210 $a Weinheim $d c2006 $c Wiley-VCH
215 0 $a xxii, 507 p $c ill $d 25 cm
225 A $v 5
320 $a Includes bibliographical references and index
606 $a Microtechnology $3 450996 $2 lc $3 736514
606 $a Production engineering $3 408009 $2 lc $3 726662
676 $a 670.42 $v 22
680 $a TS183 $b M52 2006
702 $a Kockmann $b Norbert $3 491271
801 0 $b UKM
801 0 $a cw $b BIB $c 20070802
801 1 $a cw $b 虎尾科技大學圖書館 $c 20080908