國立虎尾科技大學 |

基板溫度與真空壓力對紅外線截止濾光片之膜性影響 = Effects of Substrate Temperature and Vacuum Pressure on the Film Quality of Infrared-Cut Filter

紀錄類型:	書目-語言資料,印刷品 : 單行本
並列題名:	Effects of Substrate Temperature and Vacuum Pressure on the Film Quality of Infrared-Cut Filter
作者:	方建太,
其他團體作者:	國立虎尾科技大學
出版地:	[雲林縣]
出版者:	撰者; 撰者;
出版年:	民96[2007]
面頁冊數:	93面圖,表 : 30公分;
標題:	紅外線截止濾光片
標題:	Film Quality of Infrared-Cut Filter
電子資源:	http://140.130.12.251/ETD-db/ETD-search-c/view_etd?URN=etd-0131107-200924
摘要註:	現今光電產業迅速蓬勃發展，光電薄膜技術已成為控制光束光譜的強而有力之工具，且光學薄膜的主要功能在於改變及控制光束於光電系統中之光譜特性，此外尚有消除鬼影、色彩平衡調整及鏡面保護的功能。所以此光學薄膜的良率、穩定性及可靠度等就相當重要。在薄膜形成的過程中，有許多的摻雜因素，導致薄膜產生不同的應力反應，再加上多層膜的堆積更容易產生許多相關性的問題，所以本文主旨在於觀察試片溫度與相關製程參數對鍍膜特性的影響，從其中的變化來獲得最佳的製程參數，以順利製造出應力較小之紅外線截止濾光片。本論文研究主題在於變化不同的基板溫度與真空腔起始真空度，以獲得最佳的紅外線截止濾光片之膜性。由實驗結果中得知：當膜層經由去離子水煮沸與冷熱衝擊等環測試驗後，可發現鍍膜基板溫度為380℃時所製作的膜層結構比較穩定，不會產生脫膜之狀況，且光譜特性亦可維持原有設計之需求。當真空腔起始真空度越高時，更能增強膜層結構之膜性品質。 The photoelectric industry grows vigorously rapidly now, photoelectric membrane technology has already become the powerful tool which has controlled the light beam spectrum, and the main function of the optics membrane lies in changing and controlling the spectrum characteristic of the light beam in the photoelectric system, in addition still dispel the function that spirit's shadow , color balance the adjustment and surface of the mirror and protect. So good rate , stability and reliability of this optics membrane ,etc. are quite important . While the membrane is formed , there are a lot of factors of mixing , cause the membrane to produce different stresses and react, in addition, the piling up apter question of producing a lot of dependence of multi-layer membrane, so this text purport lie in is it try on slices of temperature with relevant to make parameter Cheng to plate influence , membrane of characteristic to observe, is it get making parameter Cheng best to come from change among them, in order to produce stress little infrared ray end and strain the slide smoothly. Thesis this study theme lie in change different base plate temperature and vacuum of initial vacuity, close at the membrane which strains the slide in order to get the best infrared ray . Learn from the experimental result: After the membrane floor is boiled and tests and tests with the cold and hot ring of lashing etc. via deionized water, can find that one layer of structure of membrane made is more steady while plating the temperature of the membrane base plate 380 degrees Centigrade , will not produce the state of taking off the membrane, and the spectrum characteristic can also keep having a demand designed originally . Take it seriously when the cavity is the higher in initial vacuity, can strengthen the membrane quality of one layer of structure of membrane even more.

基板溫度與真空壓力對紅外線截止濾光片之膜性影響 = Effects of Substrate Temperature and Vacuum Pressure on the Film Quality of Infrared-Cut Filter
方, 建太

基板溫度與真空壓力對紅外線截止濾光片之膜性影響 = Effects of Substrate Temperature and Vacuum Pressure on the Film Quality of Infrared-Cut Filter / 方建太撰 - [雲林縣] : 撰者, 民96[2007]. - 93面 ; 圖,表 ; 30公分.
參考書目：面.
紅外線截止濾光片Film Quality of Infrared-Cut Filter

基板溫度與真空壓力對紅外線截止濾光片之膜性影響 = Effects of Substrate Temperature and Vacuum Pressure on the Film Quality of Infrared-Cut Filter
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