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以電容嵌入法應用於三自由度Z-tilts微動平台之控制 = Tracki...

陳財源

以電容嵌入法應用於三自由度Z-tilts微動平台之控制 = Tracking control of the three degrees of freedom Z-tilts micropositioning stage using the capacitor insertion method

Record Type:	Language materials, printed : monographic
Paralel Title:	Tracking control of the three degrees of freedom Z-tilts micropositioning stage using the capacitor insertion method
Author:	陳財源,
Secondary Intellectual Responsibility:	劉建宏,
Secondary Intellectual Responsibility:	覺文郁,
Secondary Intellectual Responsibility:	國立虎尾科技大學
Place of Publication:	雲林縣
Published:	國立虎尾科技大學;
Year of Publication:	民96[2007]
Edition:	初版
Description:	146面圖,表 : 30公分;
Subject:	Hysteresis
Subject:	三軸同動
Online resource:	http://140.130.12.251/ETD-db/ETD-search-c/view_etd?URN=etd-0724107-133438
Summary:	本論文開發一個三自由度微動平台與三自由度雷射量測系統，並進行系統整合測試與控制。平台主要組成以壓電致動器與撓性變形機構所組成。由於壓電致動器本身會有遲滯現象的產生，本論文使用電容嵌入法改善遲滯現象的方法再加上PI控制器，可將壓電致動器的遲滯現象減小。並利用開發的三自由度之量測系統，進行三自由度的定位與循跡控制。定位控制於Z軸方向在1000nm之位移下，可控制在+/-10nm內，在3arcsec角位移之結果可控制在+/-0.1arcsec。在20Hz三軸同動之控制結果，Z軸誤差在+/-60nm，角度誤差在+/-1.5arcsec內。 In this paper, a 3-DOF ( Z-tilts) nanometer positioning stage was developed using a three-axes PZT actuators, three integrated flexure hinge and three degrees of freedom laser measuring system with 10 nm positioning resolution and 0.1 arcsec resolution in pitch and roll motion. A capacitor insertion method was used to eliminate the Hysteresis of the PZT actuators and the PI controller was used in this paper. The results of linear positioning and angular motion can achieve the errors within +/-10nm and +/-0.1arcsec. The tracking control results of three-degrees-of -freedom motion in 20 Hz were less than +/- 60nm and +/-1.5arcsec.

以電容嵌入法應用於三自由度Z-tilts微動平台之控制 = Tracking control of the three degrees of freedom Z-tilts micropositioning stage using the capacitor insertion method
陳, 財源

以電容嵌入法應用於三自由度Z-tilts微動平台之控制 = Tracking control of the three degrees of freedom Z-tilts micropositioning stage using the capacitor insertion method / 陳財源撰 - 初版. - 雲林縣 : 國立虎尾科技大學, 民96[2007]. - 146面 ; 圖,表 ; 30公分.
Hysteresis三軸同動

劉, 建宏

以電容嵌入法應用於三自由度Z-tilts微動平台之控制 = Tracking control of the three degrees of freedom Z-tilts micropositioning stage using the capacitor insertion method
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328 $a 碩士論文--國立虎尾科技大學光電與材料科技研究所
330 $a 本論文開發一個三自由度微動平台與三自由度雷射量測系統，並進行系統整合測試與控制。平台主要組成以壓電致動器與撓性變形機構所組成。由於壓電致動器本身會有遲滯現象的產生，本論文使用電容嵌入法改善遲滯現象的方法再加上PI控制器，可將壓電致動器的遲滯現象減小。並利用開發的三自由度之量測系統，進行三自由度的定位與循跡控制。定位控制於Z軸方向在1000nm之位移下，可控制在+/-10nm內，在3arcsec角位移之結果可控制在+/-0.1arcsec。在20Hz三軸同動之控制結果，Z軸誤差在+/-60nm，角度誤差在+/-1.5arcsec內。 In this paper, a 3-DOF ( Z-tilts) nanometer positioning stage was developed using a three-axes PZT actuators, three integrated flexure hinge and three degrees of freedom laser measuring system with 10 nm positioning resolution and 0.1 arcsec resolution in pitch and roll motion. A capacitor insertion method was used to eliminate the Hysteresis of the PZT actuators and the PI controller was used in this paper. The results of linear positioning and angular motion can achieve the errors within +/-10nm and +/-0.1arcsec. The tracking control results of three-degrees-of -freedom motion in 20 Hz were less than +/- 60nm and +/-1.5arcsec.
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