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共焦三角位移探頭之研製 = Development of a confo...

Jhih-Peng Wang

共焦三角位移探頭之研製 = Development of a confocal and triangulation displacement sensor

Record Type:	Language materials, printed : monographic
Paralel Title:	Development of a confocal and triangulation displacement sensor
Author:	王智鵬,
Secondary Intellectual Responsibility:	劉建宏,
Secondary Intellectual Responsibility:	覺文郁,
Secondary Intellectual Responsibility:	國立虎尾科技大學
Place of Publication:	雲林縣
Published:	國立虎尾科技大學;
Year of Publication:	民96[2007]
Edition:	初版
Description:	108面圖,表 : 30公分;
Subject:	共焦DVD雷射讀取頭
Subject:	confocal DVD optical pickup
Online resource:	http://140.130.12.251/ETD-db/ETD-search-c/view_etd?URN=etd-0813107-125041
Summary:	本論文成功研製共焦三角雷射探頭，此探頭分別採用三角量測原理及共焦式探頭的失焦誤差訊號，可同時應用於量測鏡射式反射與散射式反射之自由曲面光訊號，並成功整合於音圈馬達自動式鎖焦平台系統，應用鎖焦零點之技術而達到量測大幅度高度變動之工件表面。透過鎖焦技術分別量測鏡射式反射與散射式反射之自由曲面光訊號，實驗證實在1mm範圍內，量測鏡射式反射與測散射式反射時鎖焦誤差分別在3μm與5μm範圍內。在15mm範圍內，量測反射時鎖焦誤差分別在11μm範圍內。 This paper developed a novel confocal and triangulation displacement sensor to measure the height deviation of the free form surface with specular or scattering surfaces. The measuring principle for the specular surface is based on the astigmatic principle. It is basically a measurement of the focus error signal to be converted into the height deviation of the surface. For the scattering surface, the traditional triangulation method is used. The proposed sensor was integrated with a voice coil motor based linear stage with 1 μm resolution for the free form surface with large high deviation. By using the autofocus method form the integrated system, the measuring range is increased from 1mm to 15mm . Several samples with specular and scattering surfaces were tested in this paper. The tested results of the samples showed the worst accuracy is 3μm for the specular surface, and the worst accuracy is 11μm for the scattering surface.

共焦三角位移探頭之研製 = Development of a confocal and triangulation displacement sensor
王, 智鵬

共焦三角位移探頭之研製 = Development of a confocal and triangulation displacement sensor / 王智鵬撰 - 初版. - 雲林縣 : 國立虎尾科技大學, 民96[2007]. - 108面 ; 圖,表 ; 30公分.
共焦DVD雷射讀取頭confocal DVD optical pickup

劉, 建宏

共焦三角位移探頭之研製 = Development of a confocal and triangulation displacement sensor
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330 $a 本論文成功研製共焦三角雷射探頭，此探頭分別採用三角量測原理及共焦式探頭的失焦誤差訊號，可同時應用於量測鏡射式反射與散射式反射之自由曲面光訊號，並成功整合於音圈馬達自動式鎖焦平台系統，應用鎖焦零點之技術而達到量測大幅度高度變動之工件表面。透過鎖焦技術分別量測鏡射式反射與散射式反射之自由曲面光訊號，實驗證實在1mm範圍內，量測鏡射式反射與測散射式反射時鎖焦誤差分別在3μm與5μm範圍內。在15mm範圍內，量測反射時鎖焦誤差分別在11μm範圍內。 This paper developed a novel confocal and triangulation displacement sensor to measure the height deviation of the free form surface with specular or scattering surfaces. The measuring principle for the specular surface is based on the astigmatic principle. It is basically a measurement of the focus error signal to be converted into the height deviation of the surface. For the scattering surface, the traditional triangulation method is used. The proposed sensor was integrated with a voice coil motor based linear stage with 1 μm resolution for the free form surface with large high deviation. By using the autofocus method form the integrated system, the measuring range is increased from 1mm to 15mm . Several samples with specular and scattering surfaces were tested in this paper. The tested results of the samples showed the worst accuracy is 3μm for the specular surface, and the worst accuracy is 11μm for the scattering surface.
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