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長行程奈米級精密平台研製 = Design and Control of...

Yi-Tsung Li

長行程奈米級精密平台研製 = Design and Control of a Long-Stroke-Nano-Positioning Stage

Record Type:	Language materials, printed : monographic
Paralel Title:	Design and Control of a Long-Stroke-Nano-Positioning Stage
Author:	李羿宗,
Secondary Intellectual Responsibility:	覺文郁,
Secondary Intellectual Responsibility:	國立虎尾科技大學
Place of Publication:	雲林縣
Published:	國立虎尾科技大學;
Year of Publication:	民96[2007]
Edition:	初版
Description:	84面圖,表 : 30公分;
Subject:	&
Subject:	Ball Screw
Online resource:	http://140.130.12.251/ETD-db/ETD-search-c/view_etd?URN=etd-0731107-153144
Summary:	本論文研製一奈米級長行程精密定位平台，並整合精密控制、精密量測、結構設計與加工組裝等四項主體，其特色是結合X-Y雙軸長行程導螺桿平台、三自由度壓電微動平台、三自由度量測系統與雙軸長行程奈米級精密平台控制系統。藉由X-Y雙軸長行程導螺桿平台進行微米級長行程定位後，再由三自由度壓電微動平台進行奈米級定位，最後經由三自由度量測系統，將量測數據傳送至PID控制系統，使本平台具有300 × 300 mm之長行程定位能力、定位可達10奈米之高精度、可以34.5 mm/s之高速度移動以及可讓偏搖角補償達1 acesec之低角度誤差等特性。 A dual-axis long-stroke-nano-positioning stage was developed in this project. A traditional ball screw and linear guided way, provided by the PMI Co. Taiwan, was employed with a 3-DOF piezo-stage, 3-DOF measurement system and a PID closed-loop countroller for this stage. The working range of the stage can be up to 300 mm × 300mm with a resolution of 10 nm in each linear axis and 1 arcsec in the rotary axis.

長行程奈米級精密平台研製 = Design and Control of a Long-Stroke-Nano-Positioning Stage
李, 羿宗

長行程奈米級精密平台研製 = Design and Control of a Long-Stroke-Nano-Positioning Stage / 李羿宗撰 - 初版. - 雲林縣 : 國立虎尾科技大學, 民96[2007]. - 84面 ; 圖,表 ; 30公分.
&Ball Screw

覺, 文郁

長行程奈米級精密平台研製 = Design and Control of a Long-Stroke-Nano-Positioning Stage
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330 $a 本論文研製一奈米級長行程精密定位平台，並整合精密控制、精密量測、結構設計與加工組裝等四項主體，其特色是結合X-Y雙軸長行程導螺桿平台、三自由度壓電微動平台、三自由度量測系統與雙軸長行程奈米級精密平台控制系統。藉由X-Y雙軸長行程導螺桿平台進行微米級長行程定位後，再由三自由度壓電微動平台進行奈米級定位，最後經由三自由度量測系統，將量測數據傳送至PID控制系統，使本平台具有300 × 300 mm之長行程定位能力、定位可達10奈米之高精度、可以34.5 mm/s之高速度移動以及可讓偏搖角補償達1 acesec之低角度誤差等特性。 A dual-axis long-stroke-nano-positioning stage was developed in this project. A traditional ball screw and linear guided way, provided by the PMI Co. Taiwan, was employed with a 3-DOF piezo-stage, 3-DOF measurement system and a PID closed-loop countroller for this stage. The working range of the stage can be up to 300 mm × 300mm with a resolution of 10 nm in each linear axis and 1 arcsec in the rotary axis.
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