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Micromanufacturing : international r...

Ehmann, K. F.

Micromanufacturing : international research and development

紀錄類型:	書目-語言資料,印刷品 : 單行本
副題名:	international research and development
合作者:	EhmannK. F.,
出版地:	Dordrecht
出版者:	Springer;
出版年:	c2007.
面頁冊數:	xxxiv, 362 p.ill. : 25 cm.;
標題:	Microfabrication. -
標題:	Micromachining. -
電子資源:	http://www.loc.gov/catdir/enhancements/fy0825/2007425771-d.html
電子資源:	http://www.loc.gov/catdir/enhancements/fy0825/2007425771-t.html
附註:	"WTEC"--Cover.
內容註:	Introduction / Richard E. DeVor and Kornel F. Ehmann -- Design / Martin L. Culpepper and Thomas R. Kurfess -- Materials / David Bourell and Kamlakar Rajurkar -- Processes / Kamlakar Rajurkar and Marc Madou -- Metrology, sensors and control / Thomas R. Kurfess and Thom J. Hodgson -- Non-lithography applications / Marc Madou -- Business, education, the environment, and other issues / Thom J. Hodgson.

Micromanufacturing : international research and development
Micromanufacturing : international research and development / by K.F. Ehmann ... [et al.]. - Dordrecht : Springer, c2007.. - xxxiv, 362 p. ; ill. ; 25 cm..
Introduction / Richard E. DeVor and Kornel F. Ehmann -- Design / Martin L. Culpepper and Thomas R. Kurfess -- Materials / David Bourell and Kamlakar Rajurkar -- Processes / Kamlakar Rajurkar and Marc Madou -- Metrology, sensors and control / Thomas R. Kurfess and Thom J. Hodgson -- Non-lithography applications / Marc Madou -- Business, education, the environment, and other issues / Thom J. Hodgson..
"WTEC"--Cover.Includes bibliographical references..
ISBN 1402059493ISBN 9781402059490ISBN 1402059485ISBN 9781402059483
Microfabrication.Micromachining.

Ehmann, K. F.

Micromanufacturing : international research and development
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