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Micromanufacturing : international r...

Ehmann, K. F.

Micromanufacturing : international research and development

Record Type:	Language materials, printed : monographic
Title Information:	international research and development
Alternative Intellectual Responsibility:	EhmannK. F.,
Place of Publication:	Dordrecht
Published:	Springer;
Year of Publication:	c2007.
Description:	xxxiv, 362 p.ill. : 25 cm.;
Subject:	Microfabrication. -
Subject:	Micromachining. -
Online resource:	http://www.loc.gov/catdir/enhancements/fy0825/2007425771-d.html
Online resource:	http://www.loc.gov/catdir/enhancements/fy0825/2007425771-t.html
Notes:	"WTEC"--Cover.
Content Note:	Introduction / Richard E. DeVor and Kornel F. Ehmann -- Design / Martin L. Culpepper and Thomas R. Kurfess -- Materials / David Bourell and Kamlakar Rajurkar -- Processes / Kamlakar Rajurkar and Marc Madou -- Metrology, sensors and control / Thomas R. Kurfess and Thom J. Hodgson -- Non-lithography applications / Marc Madou -- Business, education, the environment, and other issues / Thom J. Hodgson.

Micromanufacturing : international research and development
Micromanufacturing : international research and development / by K.F. Ehmann ... [et al.]. - Dordrecht : Springer, c2007.. - xxxiv, 362 p. ; ill. ; 25 cm..
Introduction / Richard E. DeVor and Kornel F. Ehmann -- Design / Martin L. Culpepper and Thomas R. Kurfess -- Materials / David Bourell and Kamlakar Rajurkar -- Processes / Kamlakar Rajurkar and Marc Madou -- Metrology, sensors and control / Thomas R. Kurfess and Thom J. Hodgson -- Non-lithography applications / Marc Madou -- Business, education, the environment, and other issues / Thom J. Hodgson..
"WTEC"--Cover.Includes bibliographical references..
ISBN 1402059493ISBN 9781402059490ISBN 1402059485ISBN 9781402059483
Microfabrication.Micromachining.

Ehmann, K. F.

Micromanufacturing : international research and development
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010 1 $a 1402059485 $b hbk. $d EUR119.95
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200 1 $a Micromanufacturing $e international research and development $f by K.F. Ehmann ... [et al.].
210 $a Dordrecht $d c2007. $c Springer
215 1 $a xxxiv, 362 p. $c ill. $d 25 cm.
300 $a "WTEC"--Cover.
300 $a Includes bibliographical references.
327 0 $a Introduction / Richard E. DeVor and Kornel F. Ehmann -- Design / Martin L. Culpepper and Thomas R. Kurfess -- Materials / David Bourell and Kamlakar Rajurkar -- Processes / Kamlakar Rajurkar and Marc Madou -- Metrology, sensors and control / Thomas R. Kurfess and Thom J. Hodgson -- Non-lithography applications / Marc Madou -- Business, education, the environment, and other issues / Thom J. Hodgson.
512 1 $a Micromanufacturing $e international assessment of research and development
606 $a Microfabrication. $3 529495 $2 lc $3 727542
606 $a Micromachining. $3 529496 $2 lc $3 727541
676 $a 670.4 $v 22
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701 $a Ehmann $b K. F. $g Kornel F. $3 529494
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801 2 $a tw $b NFU $c 20090727 $g CCR $m 3
856 7 $2 http $3 Publisher description $u http://www.loc.gov/catdir/enhancements/fy0825/2007425771-d.html
856 7 $2 http $3 Table of contents only $u http://www.loc.gov/catdir/enhancements/fy0825/2007425771-t.html