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里曼雷射差頻干涉儀環境補償之研究 = Study on the Env...
~
沈金鐘
里曼雷射差頻干涉儀環境補償之研究 = Study on the Environment Compensation Technique for Length Measurement with a Zeeman Laser Interferometer
紀錄類型:
書目-語言資料,印刷品 : 單行本
並列題名:
Study on the Environment Compensation Technique for Length Measurement with a Zeeman Laser Interferometer
作者:
楊思澤,
其他作者:
沈金鐘,
其他團體作者:
國立虎尾科技大學
出版地:
雲林縣
出版者:
國立虎尾科技大學;
出版年:
民97[2008]
版本:
初版
面頁冊數:
73面圖,表 : 30公分;
標題:
Compensation
標題:
差頻雷射
電子資源:
http://140.130.12.251/ETD-db/ETD-search-c/view_etd?URN=etd-0121108-115110
摘要註:
本論文探討里曼雙頻雷射干涉儀的環境溫度補償,進行量測空間中環境之溫度、溼度及壓力之高精度檢測,據以修正量測精度,並整合完成一套雷射干涉儀之即時補償與校正系統。其中溫度感測器經過校正後其精度可達到0.1℃、壓力精度可達到0.1 %,最後配合微處理機與USB2.0之傳輸介面,再將數位訊號傳輸至PC的軟體中作計算與補償。預計均可滿足安捷倫公司所提出之新一代之規格。而在實驗校正過程中,我們以追朔標準源的方式進行比對,將標準溫度以線性化內插法的方式補償至MSC1212Y5數位處理器的積體電路中,補償之後再行比對校驗,最後再以二雙頻雷射來比對測長,驗證本研究中的環境感測器與原廠的差異性,以驗證本環境感測的可行性。此高精度之環境補償器,係配合正在發展中雙頻雷射干涉儀計數卡,可實際提供國內相關業者全球化發展的需求,提高產品精度。另外噪訊比較低的數位訊號以及體積小的電路設計,滿足各種精密檢測定位之應用與需要,朝精度更高的定位系統發展,未來更能將各項已成熟的技術加以整合,開發出性能優異的精密儀器設備。 In this research, the environment compensation equipment for Zeeman Laser Interferometer is developed. For compensation, the temperature, humidity and atmospheric pressure of the environment are measured precisely. After compensation, the resolution of temperature sensor can arrive 0.1°C, while the resolution of pressure sensor can arrived 0.1%. The measured data was transmitted to a PC by USB2.0 interface that controlled by a microprocessor for the calculation of compensation. It is shown that the new specifications by original manufacturer can be satisfied.During the calibration and experiment, we used standard source to investigate thoroughly, then, the standard temperature compensation was build into the digital processor (MSC1212Y5) by line repair method. Finally, in order to check the performance of this compensate device, two of dual-band Lasers were used to measure the length, it is certificated that this environment compensator can satisfy the specifications.The high accuracy of this environmental compensator for dual-frequency laser interferometer could increase the precision of the machines that indigenous manufactured. Besides, the N/S ratio of this device is low and its size is compact, therefore, it can satisfy the need of precision measurement and positioning systems.
里曼雷射差頻干涉儀環境補償之研究 = Study on the Environment Compensation Technique for Length Measurement with a Zeeman Laser Interferometer
楊, 思澤
里曼雷射差頻干涉儀環境補償之研究
= Study on the Environment Compensation Technique for Length Measurement with a Zeeman Laser Interferometer / 楊思澤撰 - 初版. - 雲林縣 : 國立虎尾科技大學, 民97[2008]. - 73面 ; 圖,表 ; 30公分.
Compensation差頻雷射
沈, 金鐘
里曼雷射差頻干涉儀環境補償之研究 = Study on the Environment Compensation Technique for Length Measurement with a Zeeman Laser Interferometer
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本論文探討里曼雙頻雷射干涉儀的環境溫度補償,進行量測空間中環境之溫度、溼度及壓力之高精度檢測,據以修正量測精度,並整合完成一套雷射干涉儀之即時補償與校正系統。其中溫度感測器經過校正後其精度可達到0.1℃、壓力精度可達到0.1 %,最後配合微處理機與USB2.0之傳輸介面,再將數位訊號傳輸至PC的軟體中作計算與補償。預計均可滿足安捷倫公司所提出之新一代之規格。而在實驗校正過程中,我們以追朔標準源的方式進行比對,將標準溫度以線性化內插法的方式補償至MSC1212Y5數位處理器的積體電路中,補償之後再行比對校驗,最後再以二雙頻雷射來比對測長,驗證本研究中的環境感測器與原廠的差異性,以驗證本環境感測的可行性。此高精度之環境補償器,係配合正在發展中雙頻雷射干涉儀計數卡,可實際提供國內相關業者全球化發展的需求,提高產品精度。另外噪訊比較低的數位訊號以及體積小的電路設計,滿足各種精密檢測定位之應用與需要,朝精度更高的定位系統發展,未來更能將各項已成熟的技術加以整合,開發出性能優異的精密儀器設備。 In this research, the environment compensation equipment for Zeeman Laser Interferometer is developed. For compensation, the temperature, humidity and atmospheric pressure of the environment are measured precisely. After compensation, the resolution of temperature sensor can arrive 0.1°C, while the resolution of pressure sensor can arrived 0.1%. The measured data was transmitted to a PC by USB2.0 interface that controlled by a microprocessor for the calculation of compensation. It is shown that the new specifications by original manufacturer can be satisfied.During the calibration and experiment, we used standard source to investigate thoroughly, then, the standard temperature compensation was build into the digital processor (MSC1212Y5) by line repair method. Finally, in order to check the performance of this compensate device, two of dual-band Lasers were used to measure the length, it is certificated that this environment compensator can satisfy the specifications.The high accuracy of this environmental compensator for dual-frequency laser interferometer could increase the precision of the machines that indigenous manufactured. Besides, the N/S ratio of this device is low and its size is compact, therefore, it can satisfy the need of precision measurement and positioning systems.
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