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微光學模仁製作與複製成形之技術開發 = Technology devel...

Chien-Chiang Chang

微光學模仁製作與複製成形之技術開發 = Technology development of micro-optical mold for the production and reproduction application

Record Type:	Language materials, printed : monographic
Paralel Title:	Technology development of micro-optical mold for the production and reproduction application
Author:	張堅強,
Secondary Intellectual Responsibility:	莊賦祥,
Secondary Intellectual Responsibility:	楊啟榮,
Secondary Intellectual Responsibility:	國立虎尾科技大學
Place of Publication:	雲林縣
Published:	國立虎尾科技大學;
Year of Publication:	民97[2008]
Edition:	初版
Description:	90面圖,表 : 30公分;
Subject:	紫外光微影電鑄模造
Subject:	UV-LIGA
Online resource:	http://140.130.12.251/ETD-db/ETD-search-c/view_etd?URN=etd-0130108-112308
Summary:	本實驗主要在於說明如何設計光罩、利用紫外光微影電鑄模造 (UV-LIGA)技術製作出一系列之微透鏡陣列模仁，並以各種檢測之方法，檢驗其特性，以求能找出更佳的製作參數。實驗主要分為兩大類，一是利用熱熔法做出微透鏡形狀之光阻，並利用紫外光微影電鑄模造(UV-LIGA)技術做出光阻高度為15 m而線寬直徑100 m到200 m之間有良好之微透鏡陣列模仁。當微透鏡陣列模仁製作出來後，再以複製成型的技術成功地製作出相似度為90％ ~ 97％之的聚甲基丙烯酸甲酯(PMMA)微透鏡成品，進而達到批次生產的目的。 This experiment is mainly to describe how to design photo mask, employ UV-LIGA technology to manufacture a series of micro lens array die float and test the characteristics by each kind of testing method to find out the better manufacturing parameters.The experiment is classified as two types, where one type employs the thermal method to make the photoresist with micro-lens shape, and UV-LIGA technology is used to make a height of 15 m photoresist and good micro lens array die float with wire diameter from 100 m to 200 m. After micro lens array die float is manufactured, the similarity of 90% ~ 97% PMMA micro lens is successfully manufactured by the forming technology to achieve the batch production.

微光學模仁製作與複製成形之技術開發 = Technology development of micro-optical mold for the production and reproduction application
張, 堅強

微光學模仁製作與複製成形之技術開發 = Technology development of micro-optical mold for the production and reproduction application / 張堅強撰 - 初版. - 雲林縣 : 國立虎尾科技大學, 民97[2008]. - 90面 ; 圖,表 ; 30公分.
紫外光微影電鑄模造UV-LIGA

莊, 賦祥

微光學模仁製作與複製成形之技術開發 = Technology development of micro-optical mold for the production and reproduction application
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330 $a 本實驗主要在於說明如何設計光罩、利用紫外光微影電鑄模造 (UV-LIGA)技術製作出一系列之微透鏡陣列模仁，並以各種檢測之方法，檢驗其特性，以求能找出更佳的製作參數。實驗主要分為兩大類，一是利用熱熔法做出微透鏡形狀之光阻，並利用紫外光微影電鑄模造(UV-LIGA)技術做出光阻高度為15 m而線寬直徑100 m到200 m之間有良好之微透鏡陣列模仁。當微透鏡陣列模仁製作出來後，再以複製成型的技術成功地製作出相似度為90％ ~ 97％之的聚甲基丙烯酸甲酯(PMMA)微透鏡成品，進而達到批次生產的目的。 This experiment is mainly to describe how to design photo mask, employ UV-LIGA technology to manufacture a series of micro lens array die float and test the characteristics by each kind of testing method to find out the better manufacturing parameters.The experiment is classified as two types, where one type employs the thermal method to make the photoresist with micro-lens shape, and UV-LIGA technology is used to make a height of 15 m photoresist and good micro lens array die float with wire diameter from 100 m to 200 m. After micro lens array die float is manufactured, the similarity of 90% ~ 97% PMMA micro lens is successfully manufactured by the forming technology to achieve the batch production.
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