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Semiconductor manufacturing technology
~
Yoo, Chue San.
Semiconductor manufacturing technology
Record Type:
Language materials, printed : monographic
Author:
YooChue San.,
Place of Publication:
Hackensack, N.J.
Published:
World Scientific;
Year of Publication:
c2008.
Description:
xii, 470 p.ill. : 24 cm.;
Series:
Advanced series in electrical and computer engineering
Subject:
Semiconductors - Design and construction. -
Subject:
Semiconductor industry. -
Notes:
Includes bibliographical references and index.
ISBN:
9812568239
Semiconductor manufacturing technology
Yoo, Chue San.
Semiconductor manufacturing technology
/ Chue San Yoo. - Hackensack, N.J. : World Scientific, c2008.. - xii, 470 p. ; ill. ; 24 cm.. - (Advanced series in electrical and computer engineering ; v. 13).
Includes bibliographical references and index..
ISBN 9812568239ISBN 9789812568236
SemiconductorsSemiconductor industry. -- Design and construction.
Semiconductor manufacturing technology
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