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Fundamental principles of optical li...
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Mack, Chris A.
Fundamental principles of optical lithography : the science of microfabrication
Record Type:
Language materials, printed : monographic
Title Information:
the science of microfabrication
Author:
MackChris A.,
Place of Publication:
Chichester, West Sussex, England
Published:
Wiley;
Year of Publication:
c2007.
Description:
xvii, 515 p.ill. : 25 cm.;
Subject:
Microlithography - Industrial applications. -
Subject:
Integrated circuits - Design and construction. -
Notes:
Includes bibliographical references and index.
ISBN:
0470018933
Fundamental principles of optical lithography : the science of microfabrication
Mack, Chris A.
Fundamental principles of optical lithography
: the science of microfabrication / Chris Mack. - Chichester, West Sussex, England : Wiley, c2007.. - xvii, 515 p. ; ill. ; 25 cm..
Includes bibliographical references and index..
ISBN 0470018933ISBN 9780470018934ISBN 0470727306ISBN 9780470727300
MicrolithographyIntegrated circuits -- Industrial applications. -- Design and construction.
Fundamental principles of optical lithography : the science of microfabrication
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