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變壓耦合式電漿蝕刻技術於奈米圖案化藍寶石基板之應用 = Fabricat...

Fuh- Shyang Juang

變壓耦合式電漿蝕刻技術於奈米圖案化藍寶石基板之應用 = Fabrication and Characteristics of Nano-Pattern on Sapphire Substrate by Transformer Coupled Plasma Etching Technology

Record Type:	Language materials, printed : monographic
Paralel Title:	Fabrication and Characteristics of Nano-Pattern on Sapphire Substrate by Transformer Coupled Plasma Etching Technology
Author:	莊大緯,
Secondary Intellectual Responsibility:	莊賦祥,
Place of Publication:	雲林縣
Published:	國立虎尾科技大學;
Year of Publication:	民99[2010]
Edition:	初版
Description:	45面圖 : 30公分;
Subject:	乾蝕刻
Subject:	圖案化藍寶石基板
Subject:	變壓式耦合電漿蝕刻
Subject:	Dry Etching
Subject:	Patterned Sapphire Substrate
Subject:	Transformer Coupled Plasma Etching
Online resource:	http://cetd.lib.nfu.edu.tw/etdservice/view_metadata?etdun=U0028-3008201010022700

變壓耦合式電漿蝕刻技術於奈米圖案化藍寶石基板之應用 = Fabrication and Characteristics of Nano-Pattern on Sapphire Substrate by Transformer Coupled Plasma Etching Technology
莊, 大緯

變壓耦合式電漿蝕刻技術於奈米圖案化藍寶石基板之應用 = Fabrication and Characteristics of Nano-Pattern on Sapphire Substrate by Transformer Coupled Plasma Etching Technology / 莊大緯撰 - 初版. - 雲林縣 : 國立虎尾科技大學, 民99[2010]. - 45面 ; 圖 ; 30公分.
含參考書目.
乾蝕刻圖案化藍寶石基板變壓式耦合電漿蝕刻Dry EtchingPatterned Sapphire SubstrateTransformer Coupled Plasma Etching

莊, 賦祥

變壓耦合式電漿蝕刻技術於奈米圖案化藍寶石基板之應用 = Fabrication and Characteristics of Nano-Pattern on Sapphire Substrate by Transformer Coupled Plasma Etching Technology
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205 $a 初版
210 $a 雲林縣 $d 民99[2010] $c 國立虎尾科技大學
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320 $a 含參考書目
328 $a 碩士論文--國立虎尾科技大學光電與材料科技研究所在職專班
510 1 $a Fabrication and Characteristics of Nano-Pattern on Sapphire Substrate by Transformer Coupled Plasma Etching Technology
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