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Introduction to microsystem technolo...
~
Dötzel, Wolfram.
Introduction to microsystem technology : = a guide for students /
Record Type:
Language materials, printed : Monograph/item
Title/Author:
Introduction to microsystem technology :/ Gerald Gerlach, Wolfram Dötzel ; translated by Dörte Müller.
Reminder of title:
a guide for students /
Author:
Gerlach, Gerald.
other author:
Dötzel, Wolfram.
Published:
Chichester, England ;J. Wiley & Sons, : c2008.,
Description:
xxiii, 351 p. :ill. ; : 26 cm.;
Subject:
Microelectromechanical systems - Design and construction. -
ISBN:
9780470058619 (cloth) :
Introduction to microsystem technology : = a guide for students /
Gerlach, Gerald.
Introduction to microsystem technology :
a guide for students /Gerald Gerlach, Wolfram Dötzel ; translated by Dörte Müller. - Chichester, England ;J. Wiley & Sons,c2008. - xxiii, 351 p. :ill. ;26 cm. - Wiley microsystem and nanotechnology series.
Includes bibliographical references and index.
Translated from the German.
ISBN: 9780470058619 (cloth) :US$110.00
LCCN: 2007050172
Nat. Bib. No.: GBA786157bnb
Nat. Bib. Agency Control No.: 014199754UkSubjects--Topical Terms:
562714
Microelectromechanical systems
--Design and construction.
LC Class. No.: TK7875 / .G4613 2008
Dewey Class. No.: 621
Introduction to microsystem technology : = a guide for students /
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Introduction to microsystem technology :
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a guide for students /
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Gerald Gerlach, Wolfram Dötzel ; translated by Dörte Müller.
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xxiii, 351 p. :
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Includes bibliographical references and index.
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