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Micromechanics and MEMS = classic an...

Institute of Electrical and Electronics Engineers.

Micromechanics and MEMS = classic and seminal papers to 1990 /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Micromechanics and MEMS/ edited by William S. Trimmer.
Reminder of title:	classic and seminal papers to 1990 /
other author:	Trimmer, W.
Published:	New York :IEEE Press, : 1997.,
Description:	1 online resource (xv, 701 p.) :ill. :
Notes:	"A selected reprint volume."
Subject:	Microelectronics. -
Online resource:	http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5273520
ISBN:	9780470545263

Micromechanics and MEMS = classic and seminal papers to 1990 /
Micromechanics and MEMSclassic and seminal papers to 1990 /[electronic resource] :edited by William S. Trimmer. - New York :IEEE Press,1997. - 1 online resource (xv, 701 p.) :ill.

"A selected reprint volume."

Includes bibliographical references and index.

Early papers in micromechanics -- Side drive actuators -- Comb drive actuators -- Electrostatic actuators -- Magnetic actuators -- Harmonic motors -- Other actuators : Thermal ; Shape memory alloy ; Impact ; Piezoelectric -- Values and pumps -- Fluidics -- Surface micromachining -- Bulk micromachining -- LIGA -- Computer aided design -- Metrology.

ISBN: 9780470545263

Source: 9780470545263IEEEhttp://ieeexplore.ieee.orgSubjects--Topical Terms:

554956
Microelectronics.
Index Terms--Genre/Form:

554714
Electronic books.

LC Class. No.: TK7874 / .M4876 1997

Dewey Class. No.: 621.381

Micromechanics and MEMS = classic and seminal papers to 1990 /
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020 $a 9780470545263
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020 $z 0780310853 (cloth)
020 $z 9780780310858 (cloth)
029 1 $a GBVCP $b 714993522
035 $a (OCoLC)557402308 $z (OCoLC)608161818
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040 $a IEEEE $b eng $c IEEEE $d OCLCQ $d OCLCE $d OCLCQ
049 $a HISA
050 4 $a TK7874 $b .M4876 1997
082 0 4 $a 621.381 $2 22
245 0 0 $a Micromechanics and MEMS $h [electronic resource] : $b classic and seminal papers to 1990 / $c edited by William S. Trimmer.
260 $a New York : $b IEEE Press, $c 1997.
300 $a 1 online resource (xv, 701 p.) : $b ill.
500 $a "A selected reprint volume."
504 $a Includes bibliographical references and index.
505 0 $a Early papers in micromechanics -- Side drive actuators -- Comb drive actuators -- Electrostatic actuators -- Magnetic actuators -- Harmonic motors -- Other actuators : Thermal ; Shape memory alloy ; Impact ; Piezoelectric -- Values and pumps -- Fluidics -- Surface micromachining -- Bulk micromachining -- LIGA -- Computer aided design -- Metrology.
588 $a Description based on print version record.
650 0 $a Microelectronics. $3 554956
650 0 $a Microelectromechanical systems. $3 559134
650 0 $a Actuators. $3 636431
650 7 $a Capteurs (technologie) $2 ram $3 880955
650 7 $a Microm�ecanique. $2 ram $3 771978
650 7 $a Dispositifs �electrom�ecaniques. $2 ram $3 771979
655 4 $a Electronic books. $2 local $3 554714
700 1 $a Trimmer, W. $3 771976
710 2 $a Institute of Electrical and Electronics Engineers. $3 640182
856 4 0 $3 IEEE Xplore $u http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5273520
994 $a 92 $b TWHIS

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