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CMOS cantilever sensor systems : = a...

Lange, D. (1970-)

CMOS cantilever sensor systems : = atomic force microscopy and gas sensing applications /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	CMOS cantilever sensor systems :/ D. Lange, O. Brand, H. Baltes.
Reminder of title:	atomic force microscopy and gas sensing applications /
Author:	Lange, D.
other author:	Baltes, H.
Published:	Berlin ,Springer, : c2002. :,
Description:	viii, 142 p. :ill. ; : 25 cm.;
Subject:	Gas detectors - Design and construction. -
Online resource:	http://www.loc.gov/catdir/enhancements/fy0817/2002067245-d.html
Online resource:	http://www.loc.gov/catdir/enhancements/fy0817/2002067245-t.html
ISBN:	3540431438 :

CMOS cantilever sensor systems : = atomic force microscopy and gas sensing applications /
Lange, D.1970-

CMOS cantilever sensor systems :atomic force microscopy and gas sensing applications /D. Lange, O. Brand, H. Baltes. - Berlin ,Springer,c2002. : - viii, 142 p. :ill. ;25 cm. - Microtechnology and MEMS.

Includes bibliographical references (p. [131]-140) and index.

ISBN: 3540431438 :NT4111

LCCN: 2002067245Subjects--Topical Terms:

775668
Gas detectors
--Design and construction.

LC Class. No.: TK7875 / .L36 2002

Dewey Class. No.: 681/.413

CMOS cantilever sensor systems : = atomic force microscopy and gas sensing applications /
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010 $a 2002067245
020 $a 3540431438 : $c NT4111
035 $a e 00035036
040 $a DLC $c DLC $d DLC $d NFU
041 0 # $a eng
042 $a pcc
050 0 0 $a TK7875 $b .L36 2002
082 0 0 $a 681/.413 $2 21
100 1 $a Lange, D. $q ( Dirk), $d 1970- $3 775663
245 1 0 $a CMOS cantilever sensor systems : $b atomic force microscopy and gas sensing applications / $c D. Lange, O. Brand, H. Baltes.
260 # $a Berlin , $c c2002. : $b Springer,
300 $a viii, 142 p. : $b ill. ; $c 25 cm.
490 0 $a Microtechnology and MEMS
504 $a Includes bibliographical references (p. [131]-140) and index.
650 # 0 $a Gas detectors $x Design and construction. $3 775668
650 # 0 $a Atomic force microscopy $x Equipment and supplies $x Design and construction. $3 775667
650 # 0 $a Levers $x Design and construction. $3 775666
650 # 0 $a Metal oxide semiconductors, Complementary $x Design and construction. $3 564465
650 # 0 $a Microelectromechanical systems $x Design and construction. $3 562714
700 1 # $a Baltes, H. $q (Henry) $3 775665
700 1 # $a Brand, Oliver, $d 1964- $3 775664
856 4 2 $3 Publisher description $u http://www.loc.gov/catdir/enhancements/fy0817/2002067245-d.html
856 4 1 $3 Table of contents only $u http://www.loc.gov/catdir/enhancements/fy0817/2002067245-t.html