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混和氫氣、氬氣或氮氣於乙炔中對電漿輔助化學氣相法沉積類鑽碳膜之機械與耐磨...

Jiong-Shiun Hsu

混和氫氣、氬氣或氮氣於乙炔中對電漿輔助化學氣相法沉積類鑽碳膜之機械與耐磨耗特性的影響 = Mechanical and Wear Properties of Diamond-like Carbon Films by Plasma Enhanced Chemical Vapor Deposition Using Acetylene Mixed with H2, Ar or N2.

Record Type:	Language materials, printed : monographic
Paralel Title:	Mechanical and Wear Properties of Diamond-like Carbon Films by Plasma Enhanced Chemical Vapor Deposition Using Acetylene Mixed with H2, Ar or N2.
Author:	張青原,
Secondary Intellectual Responsibility:	徐炯勛,
Secondary Intellectual Responsibility:	曾信雄,
Place of Publication:	雲林縣
Published:	國立虎尾科技大學;
Year of Publication:	民100[2011]
Edition:	初版
Description:	86面圖 : 30公分;
Subject:	類鑽碳膜
Subject:	機械性質
Subject:	磨耗性質
Subject:	電漿輔助化學氣相沉積法
Subject:	Diamond-like carbon films
Subject:	Mechanical properties
Subject:	Wear property
Subject:	Plasma enhanced chemical vapor deposition
Online resource:	http://cetd.lib.nfu.edu.tw/etdservice/view_metadata?etdun=U0028-2908201101530900

混和氫氣、氬氣或氮氣於乙炔中對電漿輔助化學氣相法沉積類鑽碳膜之機械與耐磨耗特性的影響 = Mechanical and Wear Properties of Diamond-like Carbon Films by Plasma Enhanced Chemical Vapor Deposition Using Acetylene Mixed with H2, Ar or N2.
張, 青原

混和氫氣、氬氣或氮氣於乙炔中對電漿輔助化學氣相法沉積類鑽碳膜之機械與耐磨耗特性的影響 = Mechanical and Wear Properties of Diamond-like Carbon Films by Plasma Enhanced Chemical Vapor Deposition Using Acetylene Mixed with H2, Ar or N2. / 張青原撰 - 初版. - 雲林縣 : 國立虎尾科技大學, 民100[2011]. - 86面 ; 圖 ; 30公分.
含參考書目.
類鑽碳膜機械性質磨耗性質電漿輔助化學氣相沉積法Diamond-like carbon filmsMechanical propertiesWear propertyPlasma enhanced chemical vapor deposition

徐, 炯勛

混和氫氣、氬氣或氮氣於乙炔中對電漿輔助化學氣相法沉積類鑽碳膜之機械與耐磨耗特性的影響 = Mechanical and Wear Properties of Diamond-like Carbon Films by Plasma Enhanced Chemical Vapor Deposition Using Acetylene Mixed with H2, Ar or N2.
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