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電解水產生氫氧燄火炬應用於分解半導體製程尾氣之探討 = = A St...

曾偉庭

電解水產生氫氧燄火炬應用於分解半導體製程尾氣之探討 = = A Study of Electrolysis of Water to Produce Hydrogen Flame Torch Applied to the Decomposition of the Tail Gas of Semiconductor Manufacturing Process /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	電解水產生氫氧燄火炬應用於分解半導體製程尾氣之探討 = / 曾偉庭撰.
其他題名:	A Study of Electrolysis of Water to Produce Hydrogen Flame Torch Applied to the Decomposition of the Tail Gas of Semiconductor Manufacturing Process /
其他題名:	A Study of Electrolysis of Water to Produce Hydrogen Flame Torch Applied to the Decomposition of the Tail Gas of Semiconductor Manufacturing Process.
作者:	曾偉庭
出版者:	雲林縣 : 國立虎尾科技大學 , : 民105.01.,
面頁冊數:	[7], 63面 : 圖, 表 ; : 30公分.;
附註:	指導教授：陳文瑞.
標題:	溫室效應. -
電子資源:	http://cetd.lib.nfu.edu.tw/etdservice/view_metadata?etdun=U0028-2801201617571300

電解水產生氫氧燄火炬應用於分解半導體製程尾氣之探討 = = A Study of Electrolysis of Water to Produce Hydrogen Flame Torch Applied to the Decomposition of the Tail Gas of Semiconductor Manufacturing Process /
曾偉庭

電解水產生氫氧燄火炬應用於分解半導體製程尾氣之探討 = A Study of Electrolysis of Water to Produce Hydrogen Flame Torch Applied to the Decomposition of the Tail Gas of Semiconductor Manufacturing Process /A Study of Electrolysis of Water to Produce Hydrogen Flame Torch Applied to the Decomposition of the Tail Gas of Semiconductor Manufacturing Process.曾偉庭撰. - 初版. - 雲林縣 : 國立虎尾科技大學 , 民105.01. - [7], 63面 : 圖, 表 ; 30公分.

指導教授：陳文瑞.

含參考書目.Subjects--Topical Terms:

878557
溫室效應.

電解水產生氫氧燄火炬應用於分解半導體製程尾氣之探討 = = A Study of Electrolysis of Water to Produce Hydrogen Flame Torch Applied to the Decomposition of the Tail Gas of Semiconductor Manufacturing Process /
LDR:01009nam a2200181 i 450 001 833844
008 160224s2015 ch ak e m 000 0 chi d
040 $a NFU $b chi $c NFU $e CCR
041 0 # $a chi $b chi $b eng
084 $a 008.166M $b 8020 105 $2 ncsclt
100 1 $a 曾偉庭 $q (Wei-Ting Tseng) $3 1061595
245 1 0 $a 電解水產生氫氧燄火炬應用於分解半導體製程尾氣之探討 = $b A Study of Electrolysis of Water to Produce Hydrogen Flame Torch Applied to the Decomposition of the Tail Gas of Semiconductor Manufacturing Process / $c 曾偉庭撰.
246 3 1 $a A Study of Electrolysis of Water to Produce Hydrogen Flame Torch Applied to the Decomposition of the Tail Gas of Semiconductor Manufacturing Process.
250 $a 初版.
260 # $a 雲林縣 : $b 國立虎尾科技大學 , $c 民105.01.
300 $a [7], 63面 : $b 圖, 表 ; $c 30公分.
500 $a 指導教授：陳文瑞.
500 $a 碩士論文--國立虎尾科技大學光電工程系光電與材料科技碩士班.
504 $a 含參考書目.
650 # 4 $2 csh $a 溫室效應. $3 878557
650 # 4 $a 四氟化碳. $3 1062030
650 # 4 $a Greenhouse Effect. $3 1062029
650 # 4 $a CF4 - carbon tetrafluoride. $3 1062028
856 4 # $u http://cetd.lib.nfu.edu.tw/etdservice/view_metadata?etdun=U0028-2801201617571300