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氣體阻障層結構具底切圖案化光阻表面覆蓋性及機械撓曲特性之研究 = = A...

林昇賦

氣體阻障層結構具底切圖案化光阻表面覆蓋性及機械撓曲特性之研究 = = A Study on the Step Coverage and Mechanical Flexibility of the Gas Barrier Structure deposited onto the Photoresist Surface with Undercut Pattern /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	氣體阻障層結構具底切圖案化光阻表面覆蓋性及機械撓曲特性之研究 =/ 林昇賦.
其他題名:	A Study on the Step Coverage and Mechanical Flexibility of the Gas Barrier Structure deposited onto the Photoresist Surface with Undercut Pattern /
其他題名:	A Study on the Step Coverage and Mechanical Flexibility of the Gas Barrier Structure deposited onto the Photoresist Surface with Undercut Pattern.
作者:	林昇賦
出版者:	雲林縣:國立虎尾科技大學, : 民107.07.,
面頁冊數:	[9], 92 面 :圖, 表 ; : 30公分.;
附註:	指導教授: 劉代山.
標題:	bending reliability. -
電子資源:	電子資源

氣體阻障層結構具底切圖案化光阻表面覆蓋性及機械撓曲特性之研究 = = A Study on the Step Coverage and Mechanical Flexibility of the Gas Barrier Structure deposited onto the Photoresist Surface with Undercut Pattern /
林昇賦

氣體阻障層結構具底切圖案化光阻表面覆蓋性及機械撓曲特性之研究 =A Study on the Step Coverage and Mechanical Flexibility of the Gas Barrier Structure deposited onto the Photoresist Surface with Undercut Pattern /A Study on the Step Coverage and Mechanical Flexibility of the Gas Barrier Structure deposited onto the Photoresist Surface with Undercut Pattern.林昇賦. - 初版. - 雲林縣:國立虎尾科技大學,民107.07. - [9], 92 面 :圖, 表 ;30公分.

指導教授: 劉代山.

碩士論文--國立虎尾科技大學光電工程系光電與材料科技碩士班.

含參考書目.

(平裝).Subjects--Topical Terms:

997908
bending reliability.

氣體阻障層結構具底切圖案化光阻表面覆蓋性及機械撓曲特性之研究 = = A Study on the Step Coverage and Mechanical Flexibility of the Gas Barrier Structure deposited onto the Photoresist Surface with Undercut Pattern /
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