| Record Type: |
Language materials, printed
: Monograph/item
|
| Title/Author: |
MEMS packaging // editors, Y.C. Lee, Yu-Ting Cheng, Ramesh Ramadoss. |
| other author: |
Cheng, Yu-Ting, |
| Published: |
Hackensack, New Jersey :World Scientific, : c2018., |
| Description: |
xiv, 348 p. :ill. ; : 24 cm.; |
| Subject: |
Microelectromechanical systems. - |
| ISBN: |
9789813229358 (cloth) : |