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Mechanical microsensors

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Wiegerink, Remco J (1964)

Mechanical microsensors

Record Type:	Language materials, printed : monographic
Author:	ElwenspoekM,
Secondary Intellectual Responsibility:	WiegerinkRemco J, 1964
Place of Publication:	Berlin
Published:	Springer;
Year of Publication:	c2001
Description:	x, 295 pill : 23 cm;
Subject:	Micromachining -
Subject:	Silicon -
Subject:	Transducers -
Subject:	Microelectromechanical systems - Design and construction -
Subject:	Detectors - Design and construction -
ISBN:	9624301557

Mechanical microsensors
Elwenspoek, M

Mechanical microsensors / M. Elwenspoek, R.J. Wiergerink - Berlin : Springer, c2001. - x, 295 p ; ill ; 23 cm.
Includes bibliographical references (p. [274]-290) and index.
ISBN 9624301557ISBN 3540675825
MicromachiningSiliconTransducersMicroelectromechanical systemsDetectors -- Design and construction -- Design and construction

Wiegerink, Remco J

Mechanical microsensors
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005 20101024062435.0
009 a00057363
010 1 $a 9624301557 $b (pbk. : cover)
010 1 $8 95 $a 3540675825 $b (pbk. : Berlin) $d NT
100 $a 20080130f 2001m y0engy01 b
101 0 $a eng
200 1 $a Mechanical microsensors $f M. Elwenspoek, R.J. Wiergerink
210 $a Berlin $d c2001 $c Springer
215 0 $a x, 295 p $c ill $d 23 cm
320 $a Includes bibliographical references (p. [274]-290) and index
606 $a Micromachining $3 429490 $2 lc $3 738058
606 $a Silicon $3 429489 $2 lc $3 737480
606 $a Transducers $3 395095 $2 lc $3 723340
606 $a Microelectromechanical systems $x Design and construction $3 429488 $2 lc $3 738057
606 $a Detectors $x Design and construction $3 417996 $2 lc $3 723998
676 $a 681/.2 $v 21
680 $a TK7875 $b E49 2001
700 $a Elwenspoek $b M $3 429486
702 $a Wiegerink $b Remco J $f 1964 $3 429487
801 0 $b DLC
801 0 $a cw $b BIB $c 20031027
801 1 $a cw $b 國立虎尾科技大學圖書館圖書館 $c 20031027

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E023409

圖書館3F 書庫

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681.2 E52 2001 c.2

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E021370

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AR 681.2 E52 2001

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2 records • Pages 1 •
1

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