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Plasma charging damage

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Cheung, Kin P

Plasma charging damage

Record Type:	Language materials, printed : monographic
Author:	CheungKin P,
Place of Publication:	London
Published:	Springer;
Year of Publication:	c2001
Description:	xii, 346 pill : 24 cm;
Subject:	Semiconductors - Effect of radiation on -
Subject:	Metal oxide semiconductors - Defects -
Subject:	Plasma radiaiton -
ISBN:	1852331445

Plasma charging damage
Cheung, Kin P

Plasma charging damage / Kin P. Cheung - London : Springer, c2001. - xii, 346 p ; ill ; 24 cm.
Includes bibliographical references and index.
ISBN 1852331445
SemiconductorsMetal oxide semiconductorsPlasma radiaiton -- Effect of radiation on -- Defects

Plasma charging damage
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010 1 $2 ,457 $a 1852331445 $b (hard) $d NT
100 $a 20080130f 2001m y0engy01 b
101 0 $a eng
200 1 $a Plasma charging damage $f Kin P. Cheung
210 $a London $c Springer $d c2001
215 0 $a xii, 346 p $c ill $d 24 cm
320 $a Includes bibliographical references and index
606 $a Semiconductors $x Effect of radiation on $3 432724 $2 lc $3 732923
606 $a Metal oxide semiconductors $x Defects $3 432725 $2 lc $3 732924
606 $a Plasma radiaiton $3 432726 $2 lc $3 732925
676 $a 621.3815/2 $v 21
680 $a TK7871.85 $b C4784 2001
700 $a Cheung $b Kin P $3 432723
801 1 $a cw $b 國立虎尾科技大學圖書館圖書館 $c 20020118

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621.38152 C526 2001

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